Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom

ABSTRACT

A method of making a micro electromechanical gyroscope. A cantilevered beam structure, first portions of side drive electrodes and a mating structure are defined on a first substrate or wafer; and at least one contact structure, second portions of the side drive electrodes and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer and the first and second portions of the side drive electrodes being of a complementary shape to each other. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures and one or the first and second portions of the side drive electrodes. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer and also between the first and second portions of the side drive electrodes to cause a bond to occur therebetween. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer. The bonds are preferably eutectic bonds.

RELATED APPLICATIONS

This application is a divisional of pending prior U.S. patentapplication Ser. No. 09/629,679, filed on Aug. 1, 2000 (now U.S. Pat.No. 6,555,404). This invention is related to other inventions that arethe subject of separate patent applications filed thereon. See: U.S.patent application Ser. No. 09/629,682, filed on Aug. 1, 2000 (now U.S.Pat. No. 6,580,138) entitled “A Single Crystal, Dual Wafer, TunnelingSensor or Switch with Silicon on Insulator Substrate and a Method ofMaking Same,” the disclosure of which is incorporated herein byreference, and a divisional application of that application. U.S. patentapplication Ser. No. 10/358,471, filed Feb. 4, 2003; U.S. patentapplication Ser. No. 09/629,6.84 filed Aug. 1, 2000 entitled “A SingleCrystal, Dual Wafer, Tunneling Sensor and a Method of Making Same,” thedisclosure of which is incorporated herein by reference, and adivisional application of that application. U.S. patent application Ser.No. 10/429,988 filed May 6, 2003: U.S. patent application Ser. No.09/629,680, filed on Aug. 1, 2000 (now U.S. Pat. No. 6,580,184) entitled“A Single Crystal, Dual Wafer, Tunneling Sensor or Switch with SubstrateProtrusion and a Method of Making Same,” the disclosure of which isincoporated herein by reference, and a divisional application of thatapplication, U.S. patent application Ser. No. 10/370,124, filed Feb. 18,2003; and U.S. patent application Ser. No. 09/629,683, filed on Aug. 1,2000 entitled “A Single Crystal, Tunneling and Capacitive, Three AxesSensor Using Eutectic Bonding and a Method of Making Same” thedisclosure of which is incorporated here by reference, and a divisionalapplication of that application, U.S. patent application Ser. No.10/639,289, filed Aug. 11, 2003.

TECHNICAL FIELD

The present invention relates to micro electromechanical (MEM)gyroscopes using dual wafers which are bonded together preferablyeutectically.

BACKGROUND OF THE INVENTION

The present invention provides a new process of fabricating a singlecrystal silicon MEM gyroscopes using low-cost bulk micromachiningtechniques while providing the advantages of surface micromachining. Theprior art, in terms of surface micromachining, uses e-beam evaporatedmetal that is patterned on a silicon dioxide (SiO₂) layer to form thecontrol, self-test, and tip electrodes of a tunneling MEM sensor. Acantilevered beam is then formed over the electrodes using a sacrificialresist layer, a plating seed layer, a resist mold, and metalelectroplating. Finally, the sacrificial layer is removed using a seriesof chemical etchants. The prior art for bulk micromachining has utilizedeither mechanical pins and/or epoxy for the assembly of multi-Si waferstacks, a multi-Si wafer stack using metal-to-metal bonding and anactive sandwiched membrane of silicon nitride and metal, or a dissolvedwafer process on quartz substrates (Si-on-quartz) using anodic bonding.None of these bulk micromachining processes allow one to fabricate asingle crystal Si cantilever (with no deposited layers over broad areason the beam which can produce thermally mismatched expansioncoefficients) above a set of tunneling electrodes on a Si substrate andalso electrically connect the cantilever to pads located on thesubstrate. The fabrication techniques described herein provide thesecapabilities in addition to providing a low temperature process so thatCMOS circuitry can be fabricated in the Si substrate before the MEMSsensors are added. Finally, the use of single crystal Si for thecantilever provides for improved process reproductibility forcontrolling the stress and device geometry.

MEM gyroscopes may be used in various military, navigation, automotive,and space applications. Space applications include satellitestabilization in which MEM technology can significantly reduce the cost,power, and weight of the presently used gyroscopic systems. Automotiveair bag deployment, ride control, and anti-lock brake systems provideother applications for MEM gyroscopes and/or sensor. Militaryapplications include low drift gyros.

BRIEF DESCRIPTION OF THE INVENTION

Briefly and in general terms, the presently disclosed technologyrelated, in one aspect, to an assembly for making a MEM tunnelinggyroscope therefrom. The assembly comprises a beam structure, firstportions of side drive electrodes and a mating structure defined on afirst substrate or wafer; sense electrodes, second portions of the sidedrive electrodes and a mating structure defined on a second substrate orwafer, the mating structure on the second substrate or wafer being of acomplementary shape to the mating structure on the first substrate orwafer; and the second portions of the side drive electrodes being of acomplementary shape to the first portions of side drive electrodes onthe first substrate or wafer; and a pressure/heat sensitive bondinglayer disposed on at least one of said mating structures and on at leastone of said first and second portions of the side drive electrodes forbonding the mating structure defined on the first substrate or wafer tomating structure on the second substrate or wafer and for bonding saidfirst and second portions of the side drive electrodes together inresponse to the application of pressure/heat therebetween.

In another aspect, the presently disclosed technology relates to atunneling gyroscope assembly comprising a beam structure, first portionsof side drive electrodes and a mating structure defined on a firstsubstrate or wafer; at least one contact structure, second portions ofthe side drive electrodes and a mating structure defined on a secondsubstrate or wafer, the mating structure on the second substrate orwafer being of a complementary shape to the mating structure on thefirst substrate or wafer; and a bonding layer is disposed on at leastone of said mating structures and on at least one of said first andsecond portions of the side drive electrodes for bonding the matingstructure defined on the first substrate or wafer to the matingstructure on the second substrate or wafer. The mating structures arejoined one to another at the bonding layer. The bonding layer also bondsthe first and second portions of the side drive electrodes together.

In operation, a Coriolis force is produced normal to the plane of thedevice by oscillating the beam laterally across the substrate. The sidedrive electrodes are preferably fabricated with the cantilevered beam onthe first substrate and are bonded to the second substrate at the sametime that the cantilevered beam is attached. This provides for highalignment accuracy between the cantilevered beam and the sideelectrodes.

BRIEF DESCRIPTION OF THE FIGURES

FIGS. 1A through 6A depict the fabrication of a first embodiment of thecantilevered beam forming portion of a MEM gyroscope;

FIGS. 1B through 6B correspond to FIGS. 1A-6A, but show the cantileveredbeam forming portion, during its various stages of fabrication, in planview:

FIGS. 7A through 11A show, in cross section view, the fabrication of thebase portion of the gyroscope;

FIGS. 7B through 11B correspond to FIGS. 7A-9A but show the fabricationprocess for the base portion in plan view;

FIGS. 12 and 13 show the cantilevered beam forming portion and the baseportion being aligned with each other and being bonded togetherpreferably by eutectic bonding; and

FIGS. 14A and 15 show the completed MEM gyroscope in cross sectionalview, FIG. 15 being enlarged compared to FIG. 14A;

FIG. 14B shows the completed MEM gyroscope in plan view;

FIGS. 16 and 17 show a modification of the cantilevered beam formingportion wherein the beam is formed on an etch stop layer and also shownthe base portion being aligned therewith and being bonded theretopreferably by eutectic bonding;

FIGS. 18A and 18 b show the completed MEM gyroscope in cross sectionalview and plan views; and

FIG. 19 shows a modification wherein a relatively small ribbon conductoris provided on the cantilevered beam.

DETAILED DESCRIPTION

Several embodiments of the invention will be described with respect tothe aforementioned figures. The first embodiment will be described withreference to FIGS. 1A through 15. A second embodiment will be discussedwith reference to FIGS. 16 through 18B. Further modifications aredescribed thereafter.

The MEM gyroscope shown in the accompanying figures is not drawn toscale, but rather are drawn to depict the relevant structures for thoseskilled in this art. Those skilled in this art realize that thesedevices, while mechanical in nature, are very small and are typicallymanufactured using generally the same type of technology used to producesemiconductor devices. Thus a thousand or more devices might well bemanufactured at one time on a silicon wafer. To gain an appreciation ofthe small scale of these devices, the reader may wish to turn to FIG. 15which includes size information for the first embodiment of a MEMgyroscope utilizing the present invention. The figure numbers with theletter ‘A’ appended thereto are section views taken as indicated in theassociated figure numbers with the letter ‘B’ appended thereto, butgenerally speaking only those structures which occur at and immediatelyadjacent the section are shown and not structures which are well behindthe section. For example, in FIG. 2A, the portion of the mask 14 whichforms the upper arm of the letter E shaped structure seen in FIG. 2Bdoes not appear in FIG. 2A since it is located spaced from the planewhere the section is taken; however, the opening 14-3 behind the sectionline which is used to help define one of the two side drive electrodesof the gyroscope is shown. The section views are thus drawn for ease ofillustration.

Turning to FIGS. 1A and 1B, a starting wafer for the fabrication of thecantilever is depicted. The starting wafer includes a wafer of bulkn-type silicon (Si) 10 upon which is formed a thin layer of doped p-typesilicon 12. The silicon wafer 10 is preferably of a single crystallinestructure having a <100> crystalline orientation. The p-type siliconlayer 12 is preferably grown as an epitaxial layer on silicon wafer 10.The layer 12 preferably has a thickness of in the range of 1 to 20micrometers (μm), but can have a thickness anywhere in the range of 0.1μm to 800 μm. Generally speaking, the longer the cantilevered beam isthe thicker the beam is. Since layer 12 will eventually form thecantilevered beam, the thickness of layer 12 is selected to suit thelength of the beam to be formed.

Layer 12 in this embodiment is with Boron such that its resistivity isreduced to less than 0.05 Ω-cm and is preferably doped to drop itsresistivity to the range of 0.01 to 0.05 Ω-cm. The resistivity of thebulk silicon wafer or substrate 10 is preferably about 10 Ω-cm. Boron isa relatively small atom compared to silicon, and therefore including itas a dopant at the levels needed (10²⁰) in order to reduce theresistivity of the layer 12 tends to induce stress which is preferablycompensated for by also doping, at a similar concentration level, anon-impurity atom having a larger atom size, such as germanium.Germanium is considered a non-impurity since it neither contributes norremoves any electron carriers in the resulting material.

Layer 12 shown in FIGS. 1A and 1B is patterned using well knownphotolithographic techniques to form a mask layer 14, patterned asshown, preferably to assume the shape of a capital letter ‘E’, withmesas 14-3, which will be used to help define side drive electrodes forthe gyroscope. While the shape of the capital letter ‘E’ is preferred,other shapes can be used. In this embodiment, the outer peripheralportion of the E-shape will form a mating and supporting structure whichwill be used to join the cantilever portion of the sensor to the baseportion and to support the cantilevered beam above the base portion.

After the mask layer 14 has been patterned as shown in FIGS. 2A and 2B,the wafer is subjected to a plasma etch in order to etch through theexposed thin layer of p-type doped silicon 12 and also to over etch intothe silicon wafer 10 by a distance of approximately 500 Å. This etchingstep defines the outer peripheral portion of the E-shape in layer 12, acantilevered beam having a thick portion 12-2 and a thin elongatedportion 12-5 as well as portions 12-3 of the side drive electrodes.

The mask 14 shown in FIGS. 2A and 2B is then removed and anotherphotoresist layer 16 is applied, which is patterned as shown in FIGS. 3Aand 3B by providing two openings therein 16-1, 16-2 plus two openingslabeled 16-3 which align with the two small portions 12-3 of layer 12which remain due to the aforementioned etching step. Opening 16-1basically follows the outer perimeter of the ‘E’ shape of the underlyingthin layer of p-type silicon 12 while opening 16-2 is disposed at oradjacent an end of the thick portion 12-2 (FIG. 4B) of the interior legof the ‘E’-shaped p-type silicon layer 12. The interior leg 12-2, 12-5will become to the cantilevered beam.

Layers of Ti/Pt/Au are next deposited over mask 16 and through openings16-1, 16-2 and 16-3 to form a post contact 18-1, a tunnelling tipcontact 18-2 and two side drive electrode contacts 18-3. The Ti/Pt/Aulayers preferably have a total thickness of about 2000 Å. The individuallayers of Ti and Pt may have thicknesses in the ranges of 100-200 Å and1000-2000 Å, respectively. After removal of the photoresist 16, thewafer is subjected to a sintering step at approximately 520° C. to forman ohmic Ti—Si juncture between contacts 18-1 and 18-2 and theunderlying layer 12. As will be seen with reference to FIG. 19, thesintering step can be eliminated if a metal layer, for example, is usedto connect contacts 18-1, 18-2 and 18-3.

As another alternative, which does rely on the aforementioned sinteringstep occurring, post contact 18-1 may be formed by layers of Ti and Au(i.e without Pt), which would involve an additional masking step toeliminate the Pt layer from post contact 18-1. However, in thisalternative, the sintering would cause Si to migrate into the Au to forman Au/Si eutectic at the exposed portion of post contact 18-1 shown inFIGS. 4A and 4B. As a further alternative, the exposed portion of thepost contact 18-1 shown in FIGS. 4A and 4B could simply be deposited asAu/Si eutectic, in which case the Pt layer in the post contact 18-1could be optionally included. Post contact 18-1 may be eliminated if thesubsequently described bonding between the cantilevered beam formingportion 2 and the base portion 4 occurs non-eutectically.

As a result, the exposed portion of the post contact 18-1 and theexposed portions 18-3 of the side drive electrodes 12-2, 18-3 shown inFIGS. 4A and 4B are formed preferably either by Au or by Au/Si. When thecantilevered beam forming portion 2 and the base portion 4 are mated asshown and described with reference to FIGS. 12 and 13 (and withreference to FIGS. 16 and 17 for a second embodiment), one of theexposed mating surfaces is preferably a Au/Si eutectic while the otheris preferably Au. Thus, exposed mating surfaces 18-1, 18-3 canpreferably be either Au and Au/Si if the exposed mating surface on thebase portion 4 is the other material, i.e., preferably either Au/Si orAu so that a layer of Au/Si confronts a layer of Au.

The structures shown in FIGS. 4A and 4B are then covered with a layer ofphotoresist 20 which, as shown in FIG. 5A, is patterned as shown inFIGS. 5A and 5B, with a opening 20-2 therein over tunnelling tip contact18-1. Those skilled in the art will appreciate that the size of theopenings 16-1, 16-2, 16-3 and 20-2 are not drawn to scale on the figuresand that openings 16-2 and 20-2 would tend to be significantly smallerthan would be openings 16-1 and 16-3-1. As such, when a rather thicklayer of Au 26, preferably having a thickness of about 15,000 Å, isdeposited on the wafer, it basically clogs opening 20-2 (see FIG. 5A).Those skilled in the art will appreciate that there is fill-in at thesides of a mask when a layer such as Au layer 26 is deposited because ofan increasing overhang which occurs at the edges of opening 20-2 as thedeposition process proceeds. Since opening 20-2 is rather narrow, thedeposited Au 26, as shown at numeral 26-2, assumes a pyramidal-like orconical-like shape as the opening is clogged with Au. The thickness ofthe deposition of Au layer 26 is sufficiently thick to assure that layer26 will close across the top of opening 20-2 during the depositionprocess and so that structure 26-2 assumes its pointed configuration.

The photoresist 20 is then dissolved lifting off the layer 26 formedthereon and leaving the structures depicted by FIGS. 6A and 6B.

The fabrication of the base portion 4 (See FIG. 4) of this embodiment ofthe MEM gyroscope will now be described with reference to FIGS. 7Athrough 11B. Turning to FIGS. 7A and 7B, a wafer 30 of silicon is shownupon which a layer of photoresist has been deposited and patterned (i)to assume preferably the outer peripheral shape of a capital letter ‘E’50-1 complementary to the outer peripheral shape of patterned mask layer14 (FIG. 2B) and (ii) to define mesas 50-3 complementary to the size,shape and location of the first portions 12-3, 18-3 of the side driveelectrode formed. on the cantilevered beam forming portion 2. Theexposed silicon is then subjected to an etch, etching it backapproximately 20,000 A, to define a protruding portion 30-1 of wafer 30under the patterned mask 50-1 of the photoresist and protruding portions30-3 under mesas 50-3. The photoresist mask 50 is then removed and wafer30 is oxidized to form layers of oxide 52, 54 on its exposed surfaces.The oxide layers are each preferably about 1 μm thick. Of course, theend surfaces shown in FIG. 8A are not shown as being oxidized because itis assumed that the pattern shown in FIG. 8A (and the other figures) isonly one of a number of repeating patterns occurring across an entirewafer 30. The oxide includes protruding portions 52-1 and 52-3 thereofon protruding portions 30-1 and 30-3 of the wafer 30.

Turning to FIGS. 9A and 9B, a layer of photoresist 56 is applied having(i) an opening therein 56-1 which again assumes the outerperipheralshape of a capital letter ‘E’, as previously described and (ii) a pairof openings 56-3 to aid in the formation of the second portion of theside electrode on wafer 30. Then, a layer of Ti/Pt/Au 58, preferablyhaving a thickness of 2,000 Å, is deposited through openings 56-1, 56-3followed by the deposition of a layer 60 of an Au/Si eutectic preferablywith a 1,000 Å thickness. Layers 58-1, 58-3 of Ti/Pt/Au and layers 60-1,60-3 of the Au/Si eutectic are thus formed. Layers 58-1 and 60-preferably follow the outerperipheral shape of a capital letter ‘E’, ascan be clearly seen in FIG. 9B, while layers 58-3 and 60-3 disposed onthe oxided protrusion 52-3 define the second portions of the side driveelectrodes. The second portions of the side drive electrodes will bemated with the first portions thereof formed on cantilevered beamforming portion 2 in due course. Of course, if the post contact 18-1 andthe side electrode contacts 18-3 (see FIG. 4A) are either formed of anAu/Si eutectic or has an Au/Si eutectic disposed thereon, then layers60, 60-1, 60-3 may be formed of simply Au or simply omitted due to thepresence of Au at the exposed layers 58-1 and 58-3.

Photoresist layer 56 is then removed and a layer 62 of photoresist isapplied and patterned to have (i) openings 62-2, 62-3, 62-4 and 62-6, asshown in FIG. 10A, (ii) openings for pads 40-1 through 40-5 and theirassociated ribbon conductors 42; (iii) an opening for guard ring 44 andits pad, as depicted in FIG. 10B. For the ease of illustration, theopening for guard ring 44 is not shown in FIG. 10A. A layer 38 ofTi/Pt/Au is then deposited over the patterned photoresist layer 62 andthrough openings 62-2, 62-3, 62-4 and 62-6 therein forming contacts38-2, 38-3, 38-4 and 38-6 and the photoresist 62 is removed to therebyarrive at the structure shown in FIGS. 11A and 11B. Those contacts areinterconnected with their associated pads 40-2 through 44-4 by theaforementioned ribbon conductors 42, which contacts 40 and ribbonconductors 42 are preferably formed at the same time as contacts 38-3,38-4 and 38-2 are formed. The outerperipheral layers 58-1 and 60-1 arealso connected with pad 40-1 by an associated ribbon conductor 42. Theprotrusion 30-1, which preferably extends approximately 20,000 Å highabove the adjacent portions of wafer 30′, and the relatively thin layers58-1 and 60-1 form the mating structure for the base portion 4.

Contacts 38-6 are preferably triangularly shaped with their hypotenusesconfronting each other and positioned such that the hypotenuses will lieunder a centerline of the elongated cantilevered beam 12-5 when thecantilevered beam forming portion 2 is joined to the base portion 4.

Pad 40-1 is connected to layers 58-1 and 60-1 and provides a pad for abeam bias voltage. Pad 40-2 is connected to tip contact 38-2 andprovides a pad for the tip contact 38-2. Pad 40-3 is connected tocontacts 38-3 and provides a pad for the side drive electrodes 38-5,58-3 and 60-3 (when the two portions 2, 4 are bonded together). Pad 40-4is connected to contact 38-4 and provides a pad for device testing. Pad40-5 is connected to contact 38-5 and provides a pad for a pull downvoltage. Pads 40-6 are connected to the two side sense contacts 38-6 andprovides pads for the side sense contacts 38-6.

Turning to FIG. 12, the cantilevered beam forming portion 2 is nowbonded to base portion 4. As is shown in FIG. 12, the two wafers 10 and30 are brought into a confronting relationship so that their matingstructures 18-1, 30-1, 58-1 and 60-1 are in alignment and so the firstand second portions of the side drive electrode are in alignment and sothat (i) layers 18-1 and 60-1 properly mate with each other and (ii)layers 18-3 and 60-3 properly mate with each other. Pressure and heat(preferably by applying a force of 5,000 N at 400° C. between three inchwafers 2, 4 having 1000 sensors disposed thereon) are applied so thateutectic bonding occurs between layers 18-1 and 60-1 and between layers18-3 and 60-3 as shown in FIG. 13. Thereafter, silicon wafer 10 isdissolved so that the MEM sensor structure shown in FIG. 14 is obtained.The p-type silicon layer 12 includes a portion 12-2 which serves as thecantilevered beam and another portion which is attached to the baseportion 4 through the underlying layers. The gold contact 26-2 iscoupled to pad 40-1 by elements 18-2, 12-2, 12-1, 18-1, 60-1, 58-1 andits associated ribbon conductor 42. If the bonding is donenon-eutectically, then higher temperatures will be required.

Protrusion 30-1 and layers 18-1, 60-1, and 58-1 have preferably assumedthe shape of the outerperpherial edge of a capital letter ‘E’ andtherefore the cantilevered beam of the MEM gyroscope is well protectedby this physical shape. After performing the bonding, silicon layer 10is dissolved away to arrive at the resulting MEM sensor shown in FIGS.14A and 14B. The silicon can be dissolved with ethylenediaminepyrocatechol (EDP). This leaves only the Boron doped siliconcantilevered beam 12 with its associated contact 26-2 and its supportingor mating structure 18-1 bonded to the base structure 4. Preferabledimensions for the MEM sensor are given on FIG. 15. The beam aspreferably has a length of 200 to 300 μm (0.2 to 0.3 mm).

FIG. 15 is basically identical to FIG. 14, but shows the MEM sensor insomewhat more detail and the preferred dimensions of the MEM sensor arealso shown on this figure.

Instead of using EDP as the etchant, plasma etching can be used if athin layer 11 of SiO₂ is used, for example, as an etch stop betweenlayer 12 and substrate 10. FIGS. 16, 17, 18A and 18B are similar toFIGS. 12, 13, 14A and 14B, respectively, but differ in that a thin layerof SiO₂ is shown being utilized as an etch stop between layer 12 andsubstrate 10. Such a thin layer 11 of SiO₂ can be formed by theimplantation of oxygen so that layer 12 retains the same crystallinestructure of wafer 10. In this case the layer 12 may be undoped or maybe doped with Boron or other dopants. The plasma etch in this case is atwo step process. A first etch, which preferentially etches silicon,removes substrate 10 and a second etch, which preferentially etchesSiO₂, removes the etch stop layer 11 to arrive at the structure shown inFIGS. 18A and 18B. If layer 12 is undoped or nor sufficiently doped toprovide proper conductivity (for example, to a level less than 0.05Ω-cm), then a thin ribbon conductor 18-4 should be affixed to layer 12as shown in FIG. 19 to interconnect contacts 18-1, 18-2 and 18-3.Generally speaking, it is preferred to use the conductivity in thecantilevered beam, by sufficiently doping same, to interconnect contacts18-1, 18-2 and 18-3 rather than a separate ribbon conductor 18-4 sincethe existence of a ribbon conductor on the beam 12 may interfere withits freedom of movement in response to acceleration events which agyroscope should detect. If a ribbon conductor 18-4 is used, then isshould be kept as small as practicable in both height and width tominimize its effect on the cantilevered beam. It will be recalled thatin the embodiment of FIGS. 1A-15, that after the layer of Ti/Pt/Au 18was applied forming contacts 18-1, 18-2 and 18-3, they were sintered inorder to form an ohmic bond with Boron-doped cantilever 12. It was notedthat sintering could be avoided by providing a ribbon conductor betweenthe contacts. The just-described ribbon conductor 18-4 has the advantageof omitting any steps needed to form ohmic contacts with the beam.

It can be seen that the Si layer 12 formed on silicon wafer 10 may be(i) doped with Boron or (ii) may be either undoped or doped with otherimpurities. If doped with Boron, layer 12 is preferably formed byepitaxial growth. If layer 12 is either undoped or doped with otherimpurities, it is preferably formed by methods other than epitaxialgrowth on substrate 10 and a thin etch stop layer 11 is then preferablyformed between the thin Si layer 12 and the silicon substrate or wafer10. This configuration is called Silicon On Insulator (SOI) and thetechniques for making an SOI structure are well known in the art andtherefor are not described in detail herein. The etch stop layer 11, ifused, is preferably a layer of SiO₂ having a thickness of about 1-2 82 mand can then be made, for example, by the implantation of oxygen intothe silicon wafer 10 through the exposed surface so as to form the etchstop layer 11 buried below the exposed surface of the silicon wafer 10and thus also define, at the same time, the thin layer of silicon 12adjacent the exposed surface. This etch stop layer 11 is used to releasethe cantilevered beam from wafer 10 by the aforementioned two stepplasma etch process. If layer 12 is doped with Boron, it is doped toreduce the resistivity of the epitaxial layer 12 to less than 1 Ω-cm. Atthat level of Boron doping the epitaxial layer 12 can resist asubsequent EDP etch used to release the cantilevered beam from wafer 10and thus an etch stop layer is not needed. Preferably, the level ofdoping in layer 12 reduces the resistivity of layer 12 to less than 0.05Ω-cm.

The structures shown in the drawings has been described in manyinstances with reference to a capital letter ‘E’. However, this shape isnot particularly critical, but it is preferred since it provides goodmechanical support for the cantilevered structure formed primarily bybeam portion of layer 12. Of course, the shape of the supporting andmating structure around cantilever beam 12 can be changed as a matter ofdesign choice and it need not form the perimeter of the capital letter‘E’, but can form any convenient shape, including circular, triangularor other shapes as desired.

This description includes references to Ti/Pt/Au layers. Those skilledin the art will appreciate that this nomenclature refers to a situationwhere the Ti/Pt/Au layer comprises individual layers of Ti, Pt and Au.The Ti layer promotes adhesion, while the Pt layer acts as a barrier tothe diffusion of Si from adjacent layers into the Au. Other adhesionlayers such as Cr and/or other diffusion barrier layers such as a Pdcould also be used or could alternatively be used. It is often desirableto keep Si from migrating into the Au, if the Au forms a contact, sinceif Si diffuses into an Au contact it will tend to form SiO₂ on theexposed surface and, since SiO₂ is a dielectric, it has deleteriouseffects on the ability of the Au contact to perform its intendedfunction. As such, a diffusion barrier layer such as Pt and/or Pd ispreferably employed between an Au contact and adjacent Si material.However, an embodiment is discussed wherein the diffusion barrierpurposefully omitted to form an Au/Si eutectic.

The nomenclature Au/Si or Au—Si refers a mixture of Au and Si. The Auand Si can be deposited as separate layers with the understanding thatthe Si will tend to migrate at elevated temperature into the Au to forman eutectic. However, for ease of manufacturing, the Au/Si eutectic ispreferably deposited as a mixture except in those embodiments where themigration of Si into Au is specifically relied upon to form Au/Si.

Many different embodiments of a MEM device have been described. Manymore embodiments can certainly be envisioned by those skilled in the artbased the technology disclosed herein. But in all cases the basestructure 4 is united with the cantilevered beam forming structure 2 byapplying pressure and preferably also heat, preferably to cause aneutectic bond to occur between the then exposed layers of the twostructures 2 and 4. The bonding may instead be done non-eutectically,but then higher temperatures must be used. Since it is usually desirableto reduce and/or eliminate high temperature fabrication processes, thebonding between the two structures 2 and 4 is preferably doneeutectically and the eutectic bond preferably occurs between confrontinglayers of Si and Au/Si.

In operation, the side electrodes are used to create a force on thecantilevered beam that then oscillates laterally across the substrate inresponse thereto. When the gyroscopic sensor is rotated about its axis(i.e. the axis of the cantilevered beam), a Coriolis force is producednormal to the plane of the substrate. This force is detected as anoscillating tunneling current by the control electrodes in a servo loop.The servo loop responds by oscillating the control electrode voltage forforce rebalancing operation at the lateral resonant frequency of thecantilevered beam. The side drive electrodes are preferably fabricatedwith the cantilevered beam on the first substrate and are bonded to thesecond substrate at the same time that the cantilevered beam isattached. This provides for high alignment accuracy between thecantilevered beam and the side electrodes.

Having described the invention with respect to certain preferredembodiments thereof, modification will now suggest itself to thoseskilled in the art. The invention is not to be limited to the foregoingdescription, except as required by the appended claims.

1. An assembly for making a MEM tunneling gyroscope therefrom, thcassembly comprising: (a) a beam structure, first portions of side driveelectrodes and a mating structure defined on a first substrate or wafer;(b) sense electrodes, second portions of the side drive electrodes and amating structure defined on a second substrate or wafer, the matingstructure on the second substrate or wafer being of a complementaryshape to the mating structure on the first substrate or wafer; and thesecond portions of the side drive electrodes being of a complementaryshape to the first portions of side drive electrodes on the firstsubstrate or wafer; and (c) a pressure/heat sensitive bonding layerdisposed on at least one of said mating structures and on at least oneof said first and second portions of the side drive electrodes forbonding the mating structure defined on the first substrate or wafer tomating structure on the second substrate or wafer and for bonding saidfirst and second portions of the side drive electrodes together inresponse to the application of pressure/heat therebetween.
 2. Anassembly as claimed in claim 1 wherein the first and second substratesor wafers are formed of silicon.
 3. An assembly as claimed in claim 2wherein the silicon forming the first and second substrates or wafers isof a single crystalline structure.
 4. An assembly as claimed in claim 3wherein the crystalline structure of the silicon is <100>.
 5. Anassembly as claimed in claim 4 wherein the silicon is n-type.
 6. Anassembly as claimed in claim 1 wherein said first substrate includes athin etch stop layer and wherein the beam structure, the first portionsof side drive electrodes and the mating structure thereof arc disposedadjacent said etch stop layer.
 7. An assembly as claimed in claim 6wherein the said beam structure is undoped and wherein a thin elongateribbon conductor is disposed on said beam structure.
 8. An assembly asclaimed in claim 7 wherein said beam structure is doped to reduce itsresistivity is less than 0.05 Ω-cm.
 9. An assembly as claimed in claim 6wherein the thin etch stop layer is SiO₂.
 10. An assembly as claimed inclaim 1 wherein a pointed contact is disposed on an end of said beamstructure.
 11. An assembly as claimed in claim 10 wherein thecantilevered beam structure is formed from an epitaxial layer of siliconon said first substrate or wafer, said epitaxial layer being doped witha dopant.
 12. An assembly as claimed in claim 11 wherein the epitaxiallayer is doped with Boron at a sufficient concentration to reduce theresistivity of the epitaxial layer to less than 0.05 Ω-cm.
 13. Anassembly as claimed in claim 12 further including first and second ohmiccontacts on said epitaxial layer, said second ohmic contact beingdisposed near a distal end of the beam structure arid said first ohmiccontact forming the mating structure on the first substrate or wafer.14. An assembly as claimed in claim 13 further wherein said first andsecond ohmic contacts are Ti/Pt/Au contacts.
 15. An assembly as claimedin claim 14 wherein a relatively thick layer of Ti/Pt/Au is disposed onthe first and second ohmic Ti/Pt/Au contacts , a first portion of therelatively thick layer of Ti/Pt/Au being disposed on said first ohmicTi/Pt/Au contact and providing the mating structure on the firstsubstrate and a second portion of the relatively thick layer of Ti/Pt/Auforming a pointed contact on said second ohmic Ti/Pt/Au contact.
 16. Anassembly as claimed in claim 14 further including Ti/Pt/Au contactsdisposed on said second substrate or wafer, at least one of saidcontacts on the second substrate or wafer defining the mating structureon the second substrate or wafer.
 17. An assembly as claimed in claim 16wherein the bonding layer is provided by a layer of Au-Si eutecticdisposed on the Ti/Pt/Au contact on said second substrate and/or by alayer of Au-Si eutectic disposed on the first portion of the relativelythick layer of Ti/Pt/Au on the first substrate or wafer.
 18. A MEMtunneling gyroscope assembly comprising: (a) a beam structure, firstportions of side drive electrodes and a mating structure defined on afirst substrate or wafer; (b) at least one contact structure, secondportions of the side drive electrodes and a mating structure defined ona second substrate or wafer, the mating structure on the secondsubstrate or wafer being of a complementary shape to the matingstructure on the first substrate or wafer; and (c) a bonding layer isdisposed on at least one of said mating structures and on at least oneof said first and second portions of the side drive electrodes forbonding the mating structure defined on the first substrate or wafer tothe mating structure on the second substrate or wafer, the matingstructures being joined one to another at said bonding layer, and forbonding said first and second portions of the side drive electrodestogether, the portions of the side drive electrodes being joined one toanother at said bonding layer.
 19. A MEM tunneling gyroscope assembly asclaimed in claim 18 wherein the first and second substrates or wafersare each formed of single crystal silicon.
 20. A MEM tunneling gyroscopeassembly as claimed in claim 19 wherein the crystalline structure of thesilicon is <100>.
 21. A MEM tunneling gyroscope assembly as claimed inclaim 18 wherein the cantilevered beam structure is formed from anepitaxial layer of silicon on said first substrate or wafer, saidepitaxial layer being doped with a dopant.
 22. A MEM tunneling gyroscopeassembly as claimed in claim 18 wherein the epitaxial layer is dopedwith Boron at a sufficient concentration to reduce the resistivity ofthe epitaxial layer to less than less than 0.05 Ω-cm.
 23. A MEMtunneling gyroscope assembly as claimed in claim 22 further includingfirst and second ohmic contacts on said epitaxial layer, said secondohmic contact being disposed near a distal end of the beam structure andsaid first ohmic contact forming the mating structure on the firstsubstrate or wafer.
 24. A MEM tunneling gyroscope assembly as claimed inclaim 21 further including first and second ohmic contacts on saidepitaxial layer, said second ohmic contact being disposed near a distalend of the beam structure and said first ohmic contact forming themating structure on the first substrate or wafer.
 25. A MEM tunnelinggyroscope assembly as claimed in claim 24 wherein a relatively thicklayer of metal is disposed on the first and second ohmic contacts, afirst portion of the relatively thick layer of metal being disposed onsaid first ohmic contact and providing the mating structure on the firstsubstrate or wafer and a second portion of the relatively thick layer ofmetal forming a pointed contact on said second ohmic contact.
 26. A MEMtunneling gyroscope assembly as claimed in claim 25 further includingmetal contacts disposed on said second substrate or wafer, at least oneof said contacts on the second substrate or wafer defining the matingstructure on the second substrate or wafer.
 27. A MEM tunnelinggyroscope assembly as claimed in claim 26 wherein the bonding layer isprovided by a layer of Au-Si eutectic disposed on the metal contact onsaid second substrate or wafer and/or by a layer of Au-Si eutecticdisposed on the first portion of the relatively thick layer of metal onthe first substrate or wafer.
 28. A MEM tunneling gyroscope assembly asclaimed in claim 18 wherein the cantilevered beam structure is formedfrom said first substrate or wafer with a layer of SiO₂ being providedbetween said cantilevered beam structure other portions of said firstsubstrate or wafer.